Rotational feedthrough using ultrasonic motor for high vacuum condition

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چکیده

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Rotational feedthrough using ultrasonic motor for high vacuum condition

A vacuum environment is indispensable for various measurement devices. To make the use of these devices easy, the mechatronics systems for vacuum conditions, for example, a sample stage, should be advanced. In this paper, we propose a rotational feedthrough using an ultrasonic motor. An ultrasonic motor has many advantages, and is suitable for achieving vacuum conditions. However, the piezoelec...

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ژورنال

عنوان ژورنال: Vacuum

سال: 2002

ISSN: 0042-207X

DOI: 10.1016/s0042-207x(01)00411-0